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BPN308: Plastically Self-Aligned Micromirrors

Project ID BPN308
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Start Date Fri 2005-Aug-26 17:23:07
Last Updated Wed 2008-Apr-09 02:22:23
Abstract This project aims to use the plastic deformation of single-crystal-silicon as the key process to make Angular Vertical Comb-drive (AVC) torsional microactuators using a simple three-mask process on silicon-on-insulator wafer and yet providing versatility for the potential applications in Optical MEMS (switches, bi-directional free-space laser communications), RF MEMS (variable capacitor), Image/display (head mount display) and the others.
Status Continuing
Funding Source
IAB Research Area NanoPlasmonics, Microphotonics & Imaging
Researcher(s) SangHoon Lee, Chieh Chang
Advisor(s) Liwei Lin, Ming Wu
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