| Project ID |
BPN318 |
| Website |
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| Start Date |
Thu 2005-Sep-01 17:11:25 |
| Last Updated |
Wed 2006-Feb-15 13:49:27 |
| Abstract |
The long term range of this project was to demonstrate fabrication and control of a potential integrated FLEMS (Floating Electromechanical) Gyro using SiGe MEMS Technology. The sensor system is comprised of a disk-shaped proof mass that is to be electrostatically suspended between sense and drive electrodes located above, below, and at the sides of the disk. An attractive feature of this design is that the proof mass is not structurally linked via suspension, so that mechanical losses associated with anchors are eliminated |
| Status |
Continuing |
| Funding Source |
Federal |
| IAB Research Area |
Package, Process & Microassembly |
| Researcher(s) |
Marie-Ange Eyoum, David Garmire |
| Advisor(s) |
Tsu-Jae King, Roger T. Howe, James W. Demmel, Sanjay Govindjee |
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