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BPN331: Plastically Self-Alligned Micromirrors

Project ID BPN331
Website
Start Date Fri 2006-Jan-13 20:52:57
Last Updated Wed 2006-Feb-01 15:21:09
Abstract This project aims to use the plastic deformation of silicon as the key process to make Angular Vertical Comb-drive (AVC) actuators using a simple 3-mask process and yet providing versatility for the various applications.
Status New
Funding Source Federal
IAB Research Area Package, Process & Microassembly
Researcher(s) TeHsi Lee
Advisor(s) Liwei Lin
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Summary Slide PDF | VIDEO
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