BPN331: Plastically Self-Alligned Micromirrors

Project ID BPN331 Website Start Date Fri 2006-Jan-13 20:52:57 Last Updated Wed 2006-Feb-01 15:21:09 Abstract This project aims to use the plastic deformation of silicon as the key process to make Angular Vertical Comb-drive (AVC) actuators using a simple 3-mask process and yet providing versatility for the various applications. Status New Funding Source Federal IAB Research Area Package, Process & Microassembly Researcher(s) TeHsi Lee Advisor(s) Liwei Lin

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