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BPN353: Integration of MEMS switches and RF passive components

Project ID BPN353
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Start Date Fri 2006-Aug-11 06:14:42
Last Updated Tue 2006-Aug-22 10:35:21
Abstract In order to develop advanced multi-functional RF devices for future applications, it is expected that significant advancements must be made to existing technologies or a new technology must be developed. One such enabling technology is the ability to integrate all passive elements and switches monolithically. This technology would represent a new class of RF design and manufacturing capabilities. In order to develop this technology and make it a reality, we are investigating the feasibility of a fabrication process integrating high quality MEMS switches, spiral inductors and MIS capacitors. Electrical and mechanical designs have been completed and prototype fabrication is currently in process.
Status New
Funding Source Industry
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Tommy Fujii, Dan McCormick
Advisor(s) Liwei Lin, Norman C. Tien
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