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BPN356: MEMS Microfabrication and Research Services at the Adriatic Research Institute

Project ID BPN356
Website
Start Date Wed 2009-Aug-19 07:14:21
Last Updated Thu 2009-Sep-24 22:31:10
Abstract Adriatic Research Institute (ARI) is a California non-profit corporation in Berkeley, CA. Through membership in the Berkeley Microfabrication Laboratory Affiliates Program since 2001, we have enjoyed year-round access to the 4" and 6" CMOS and MEMS fabrication facility on campus. Our own research projects utilize a variety of SOI-based and other MEMS processes to fabricate fast two-axis micromirror scanners, ultra-light mirrors, low-stress membranes, nanowires, etc. ARI also has an extensively equipped electronics and MEMS design and test facility. All of these facilities, our experienced staff, and customized short-courses are available to the public on consulting or contract basis.
Status Continuing
Funding Source
IAB Research Area Package, Process & Microassembly
Researcher(s) Veljko Milanovic
Advisor(s) John M. Huggins
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