BPN366: SiC TAPS: Pressure Sensor Design and Optimization

Project ID BPN366 Website Start Date Fri 2008-Feb-15 10:07:23 Last Updated Wed 2010-Aug-11 13:10:26 Abstract The goal of this work is to deliver a sensor module with MEMS-based silicon carbide TAPS sensors integrated with SiC interface circuits for extreme harsh environment applications. Status Continuing Funding Source Federal IAB Research Area Physical Sensors & Devices Researcher(s) Benjamin Cheng Advisor(s) Albert P. Pisano

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