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BPN366: SiC TAPS: Pressure Sensor Design and Optimization

Project ID BPN366
Website
Start Date Fri 2008-Feb-15 10:07:23
Last Updated Wed 2010-Aug-11 13:10:26
Abstract The goal of this work is to deliver a sensor module with MEMS-based silicon carbide TAPS sensors integrated with SiC interface circuits for extreme harsh environment applications.
Status Continuing
Funding Source Federal
IAB Research Area Physical Sensors & Devices
Researcher(s) Benjamin Cheng
Advisor(s) Albert P. Pisano
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Summary Slide PDF | VIDEO
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