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BPN368: AlN Piezo: Aluminum Nitride Wideband RF Filters

Project ID BPN368
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Start Date Wed 2007-Jan-24 21:11:17
Last Updated Thu 2008-Feb-07 15:57:22
Abstract The goal of this project is to use piezoelectric Aluminum Nitride (AlN) MEMS contour mode resonators to develop RF bandpass filters which can achieve multi-frequency per chip, CMOS compatibility and high quality factor Q. The highly-integrated bandpass filter arrays with low power dissipation and small form factor, will be promising technology to accomplish next-generation wireless communication systems.
Status Completed
Funding Source
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Yun-Ju (Matilda) Lai
Advisor(s) Albert P. Pisano
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