BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Nguyen
     
 Lee
 Lin
 Wu
 

BPN373: AlN Piezo: Aluminum Nitride CMOS-Integrated Accelerometer (MiNaSIP)

Project ID BPN373
Website
Start Date Wed 2007-Jan-24 21:21:42
Last Updated Mon 2008-Jan-28 06:41:57
Abstract The purpose of this project is to investigate the use of Aluminum-Nitride (AlN) thin films in accelerometer design. Aluminum Nitride is attractive in this regard as the piezoelectric properties of AlN remove the need for electrostatic comb structures for position sensing and the deposition of AlN is viable material for post-CMOS MEMS fabrication. The long-term objective of this project is to realize self-temperature compensating resonators through choice of electrode, sacrificial, and substrate materials; and to quantify energy dissipation caused by thermo piezo elastic dissipation at piezo/electrode boundary in piezoelectric RF resonators.
Status Continuing
Funding Source MiNaSIP
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Andrew Cardes
Advisor(s) Albert P. Pisano
Detailed Information
Secure Access

Private Abstract
Research Report
Poster
Summary Slide PDF | VIDEO
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: December 19, 2014, 4:53 pm