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BPN386: CMOS-Integrated Nanowire-Based Molecular and Gas Sensors

Project ID BPN386
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Start Date Tue 2007-Jan-30 14:15:51
Last Updated Thu 2010-Feb-04 09:58:02
Abstract This project first aims to develop a process flow to integrate silicon nanowires onto a CMOS substrate, both via and top-down and bottom-up processes. Then, by carefully designing the underlying circuitry and functionalizing the nanowire transducers, we hope to demonstrate a fully functional integrated sensing platform for various molecular agents and/or gases. The overall goal and application is to create an easy-to-use CMOS-based sensing system for low-cost portable applications.
Status Continuing
Funding Source
IAB Research Area Physical Sensors & Devices
Researcher(s) Karl Skucha
Advisor(s) Bernhard E. Boser, Ali Javey
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