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BPN405: Manufacturing Repeatability of the Frequency and Q of Capacitive Micromechanical Disk Resonators

Project ID BPN405
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Start Date Sun 2007-Jul-29 14:29:11
Last Updated Tue 2009-Feb-24 15:46:50
Abstract The long-term goal of this project is to devise methods for improving the untrimmed repeatability of micromechanical resonators so as to widen the breadth of applications addressable by such devices.
Status Continuing
Funding Source Industry
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Yang Lin
Advisor(s) Clark T.-C. Nguyen
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Poster
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