| Project ID |
BPN418 |
| Website |
|
| Start Date |
Mon 2008-Jan-07 20:25:05 |
| Last Updated |
Mon 2010-Feb-01 17:58:32 |
| Abstract |
A polymer-polysilicon cantilever bimorph device is to be utilized as a thermal infrared detector. Third generation prototypes were designed, fabricated, and are being tested. These device utilize a capacitive readout scheme, a double-beam design in order to eliminate the effect of residual stress in the polymer layer, and a nitride stopper layer for reduced sticking and pull-in. Devices are characterized using optical and thermal methods. Future goals include detailed characterization of the current prototypes, analytical model correlation, low-pressure testing, geometric optimization, and the fabrication of arrays. |
| Status |
Continuing |
| Funding Source |
Industry |
| IAB Research Area |
Physical Sensors & Devices |
| Researcher(s) |
Clinton G. Warren |
| Advisor(s) |
Albert P. Pisano |
|
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