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BPN418: MEMS Poly/Nano: Polymer Coated Cantilevers for Infrared Heat Sensing

Project ID BPN418
Website
Start Date Mon 2008-Jan-07 20:25:05
Last Updated Mon 2010-Feb-01 17:58:32
Abstract A polymer-polysilicon cantilever bimorph device is to be utilized as a thermal infrared detector. Third generation prototypes were designed, fabricated, and are being tested. These device utilize a capacitive readout scheme, a double-beam design in order to eliminate the effect of residual stress in the polymer layer, and a nitride stopper layer for reduced sticking and pull-in. Devices are characterized using optical and thermal methods. Future goals include detailed characterization of the current prototypes, analytical model correlation, low-pressure testing, geometric optimization, and the fabrication of arrays.
Status Continuing
Funding Source Industry
IAB Research Area Physical Sensors & Devices
Researcher(s) Clinton G. Warren
Advisor(s) Albert P. Pisano
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