BPN432: Micromechanical Resonant Displacement Gain Stages

Project ID BPN432 Website Start Date Thu 2008-Jan-24 12:59:51 Last Updated Tue 2009-Aug-11 10:03:53 Abstract This overall project aims to apply mechanical displacement amplification for MEMS resonators to improve the performance of various analog and digital signal processors in RF MEMS devices. These performance benefits will be investigated by analytical models and numerical simulations as well as fabrication and experimental verification. Status Continuing Funding Source DARPA IAB Research Area Physical Sensors & Devices Researcher(s) Bongsang Kim Advisor(s) Clark T.-C. Nguyen

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