BPN441: HEaTS: Temperature-Compensated & High-Q Aluminum Nitride Lamb Wave Resonators

Project ID BPN441 Website Start Date Fri 2008-Jan-25 13:40:46 Last Updated Wed 2013-Jan-30 03:39:24 Abstract The long-range goal of this project is to develop aluminum nitride (AlN) Lamb wave resonators with high Q, small frequency-temperature drift, multiple frequencies, and CMOS compatibility on one single chip. Status Continuing Funding Source DARPA IAB Research Area Wireless, RF & Smart Dust Researcher(s) Chih-Ming Lin Advisor(s) Albert P. Pisano

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