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BPN444: HEaTS: A MEMS Piezoelectric Supercritical Carbon-Dioxide Valve

Project ID BPN444
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Start Date Fri 2008-Jan-25 17:37:53
Last Updated Mon 2011-Aug-15 13:29:01
Abstract The long range goal of this research is to design and fabricate a microscale valve suitable for controlling the flow of supercritical carbon-dioxide for application to advanced printing technology (supercritical carbon-dioxide valve, SCV). This valve is actuated by aluminum nitride (AlN) beam with piezoelectric effect. This valve will be integrated with nozzles and microchannels and the whole system will be built using silicon-based micro-electro-mechanical systems (MEMS).
Status Completed
Funding Source Industry
IAB Research Area Micropower
Researcher(s) Ya-Mei Chen
Advisor(s) Albert P. Pisano
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