| Project ID |
BPN466 |
| Website |
|
| Start Date |
Thu 2008-Jul-31 10:28:27 |
| Last Updated |
Wed 2013-Jan-30 13:51:18 |
| Abstract |
The objective of the current research is to fabricate and characterize aluminum nitride
piezoelectric micromachined ultrasound transducers (pMUTs) for use in range finding and gesture
recognition applications. MEMS Aluminum Nitride (AlN) piezoelectric sensor technology has been
chosen to integrate the MEMS AlN pMUTs above CMOS on a silicon substrate. The ultimate goal of this
research is to integrate MEMS AlN pMUTs with supporting electronics on one chip to minimize chip size,
energy usage, and cost. Guided by both analytic and finite element models the optimum design
parameters are chosen to obtain the desired resonant frequency, maximum output sound pressure for
transmitter, and maximum sensitivity for receiver. We are currently exploring both fully clamped and
partially released circular membrane designs for single element and 2-D transducer arrays. |
| Status |
Continuing |
| Funding Source |
DARPA |
| IAB Research Area |
Physical Sensors & Devices |
| Researcher(s) |
Stefon Shelton, Andre Guedes |
| Advisor(s) |
David A. Horsley |
|
|
