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Huggins, Former Executive Director

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Huggins, Former Executive Director

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BPN491: SiC TAPS: Ion Beam Deposited SiC for MEMS Encapsulation

Project ID	BPN491
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Start Date	Wed 2009-Jan-28 16:48:49
Last Updated	Mon 2010-Feb-08 11:28:38
Abstract	This project seeks to create a harsh environment encapsulated strain sensor useful in high temperature and high shock environments.
Status	Continuing
Funding Source	DARPA
IAB Research Area	Package, Process & Microassembly
Researcher(s)	David R. Myers
Advisor(s)	Albert P. Pisano

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