| Project ID |
BPN541 |
| Website |
|
| Start Date |
Thu 2010-Jan-28 22:51:07 |
| Last Updated |
Tue 2010-Aug-10 21:51:33 |
| Abstract |
The use of high voltages (>100 volts) in MEMS-based resonators presents a pathway towards
achieving low motional resistances while maintaining excellent linearity, as would be required, for
example, in a MEMS-based power amplifier. This research demonstrates the feasibility of creating MEMS
resonators which can withstand such voltages without succumbing to electrical pull-in, focusing on
careful device design informed by FEM simulation. |
| Status |
Continuing |
| Funding Source |
Federal |
| IAB Research Area |
Wireless, RF & Smart Dust |
| Researcher(s) |
Brian Pepin |
| Advisor(s) |
Clark T.-C. Nguyen |
|
|
