BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Muller
     
 Lee
 Lin
 Wu
 

BPN541: High-Voltage MEMS Resonators

Project ID BPN541
Website
Start Date Thu 2010-Jan-28 22:51:07
Last Updated Tue 2010-Aug-10 21:51:33
Abstract The use of high voltages (>100 volts) in MEMS-based resonators presents a pathway towards achieving low motional resistances while maintaining excellent linearity, as would be required, for example, in a MEMS-based power amplifier. This research demonstrates the feasibility of creating MEMS resonators which can withstand such voltages without succumbing to electrical pull-in, focusing on careful device design informed by FEM simulation.
Status Continuing
Funding Source Federal
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Brian Pepin
Advisor(s) Clark T.-C. Nguyen
Detailed Information
Secure Access

Private Abstract
Research Report
Poster
Summary Slide PDF | VIDEO
Can’t view video click here
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: October 25, 2014, 3:14 am