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BPN628: High Frequency Piezoelectric Micromachined Ultrasound Transducers
| Project ID |
BPN628 |
| Website |
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| Start Date |
Mon 2011-Aug-15 10:31:47 |
| Last Updated |
Wed 2013-Jan-23 13:25:45 |
| Abstract |
The goal of the current research is to design and fabricate high frequency (40MHz) Aluminum
Nitride (AlN) piezoelectric micromachined ultrasound transducers (pMUTs) to be used in photoacoustic
and pulse echo imaging, such as real time three dimensional medical imaging and biometric fingerprint
authentication. Piezoelectric membranes are to be fabricated and tested in annular arrays which
enable acoustic focus control and/or phased array beam. These will then be integrated above CMOS on a
silicon substrate. |
| Status |
Continuing |
| Funding Source |
Federal |
| IAB Research Area |
Physical Sensors & Devices |
| Researcher(s) |
Yipeng Lu, Stefon Shelton, Andre Guedes |
| Advisor(s) |
David A. Horsley |
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