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BPN628: Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Project ID BPN628
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Start Date Mon 2011-Aug-15 10:31:47
Last Updated Sat 2017-Jan-28 22:03:50
Abstract This project presents the first MEMS ultrasonic fingerprint sensor with the capability to image epidermis and dermis layer fingerprints. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer- level to complementary metal oxide semiconductor (CMOS) signal processing electronics to produce a pulse-echo ultrasonic imager on a chip. To meet the 500 DPI standard for consumer fingerprint sensors, the PMUT pitch was reduced by approximately a factor of two relative to an earlier design. We conducted a systematic design study of the individual PMUT and array to achieve this scaling while maintaining a high fill-factor. The resulting 110X56 PMUT array, composed of 30um X 43um rectangular PMUTs achieved a 51.7% fill-factor, three times greater than that of the previous design. Together with the custom CMOS ASIC, the sensor chieves 75 um lateral resolution and 150 um axial resolution in a 4.6 mm X 3.2 mm image.
Status Continuing
Funding Source BSAC Member Fees
IAB Research Area Physical Sensors & Devices
Researcher(s) Xiaoyue (Joy) Jiang, Qi Wang
Advisor(s) David A. Horsley
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