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BPN655: Materials for High Quality-Factor Resonating Gyroscopes

Project ID BPN655
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Start Date Wed 2012-Jan-25 13:58:08
Last Updated Fri 2014-Jan-31 13:06:57
Abstract This project will investigate new materials suitable for achieving Q-factors in excess of 1 million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and surface losses will be performed using resonator test structures. The effect of doping and microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined double ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels of Boron doping. Higher boron doping resulted in reduced Q due to defect losses. Moreover, thermal conductivities of diamond films were measured using TDTR technique for further mapping of theory and experiment.
Status Continuing
Funding Source DARPA
IAB Research Area Physical Sensors & Devices
Researcher(s) Hadi Najar, Amir Heidari, Chen Yang
Advisor(s) David A. Horsley
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