| Project ID |
BPN655 |
| Website |
|
| Start Date |
Wed 2012-Jan-25 13:58:08 |
| Last Updated |
Fri 2014-Jan-31 13:06:57 |
| Abstract |
This project will investigate new materials suitable for achieving Q-factors in excess of 1
million in resonating gyroscopes. Experimental studies of dissipation caused by thermoelastic and
surface losses will be performed using resonator test structures. The effect of doping and
microstructure is explored on CVD diamond MEMS resonators. Hundreds of surface micromachined double
ended tuning fork (DETF) resonators were fabricated in nanocrystalline diamond (NCD) and
microcrystalline diamond (MCD) films deposited using hot filament CVD technique with varying levels
of Boron doping. Higher boron doping resulted in reduced Q due to defect losses. Moreover, thermal
conductivities of diamond films were measured using TDTR technique for further mapping of theory and
experiment. |
| Status |
Continuing |
| Funding Source |
DARPA |
| IAB Research Area |
Physical Sensors & Devices |
| Researcher(s) |
Hadi Najar, Amir Heidari, Chen Yang |
| Advisor(s) |
David A. Horsley |
|
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