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BPN678: MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)

Project ID BPN678
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Start Date Fri 2012-Feb-03 02:12:51
Last Updated Tue 2014-Aug-12 22:56:11
Abstract Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits in this project. The modular MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) platform will make use of the high performance of the individual components and integrate (1) MEMS tunable VCSEL with high-index-contrast grating (HCG) mirrors, (2) photodetectors, (3) Si photonic waveguides, couplers, and interferometers, (4) high-efficiency vertical optical coupler between III-V and Si waveguides, and (5) CMOS circuits for frequency control and temperature compensation. In order to demonstrate the capabilities of the proposed MEPHI platform, a frequency-modulated continuous-wave laser detection and ranging (FMCW LADAR) source is being developed.
Status Completed
Funding Source DARPA
IAB Research Area NanoPlasmonics, Microphotonics & Imaging
Researcher(s) Niels Quack, Behnam Behroozpour, Sangyoon Han, Phillip Sandborn
Advisor(s) Ming C. Wu, Bernhard E. Boser
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