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Physical Sensors & Devices
     
 

BPN743: Highly Responsive Curved pMUTs

Project ID BPN743
Website
Start Date Sat 2014-Feb-01 09:32:40
Last Updated Thu 2014-Aug-14 10:26:05
Abstract Ultrasonic imaging is one of the most important and widely used medical imaging techniques, which uses high-frequency sound waves to view soft tissues such as muscles, internal organs as well as blood flowing through blood vessels in real time. With the advancement of microelectromechanical systems (MEMS), ultrasonic devices operated based on plate flexural mode have shown remarkable improvements in bandwidth, cost, and yield over the conventional thickness- mode PZT sensors. MEMS fabrication technologies can be utilized to realize both capacitive (cMUTs) and piezoelectric (pMUTs) micromachined ultrasonic transducers However, these devices could enjoy much more widespread applications if they were adjustable, better focused with lower energy requirements. This project aims to highly responsive pMUTs based on CMOS compatible fabrication processes with the potential to replace the plate-based pMUTs for high electromechanical coupling ultrasonic transducer arrays for applications in fingerprint IDs, body movement sensors, and hand- held medical imagers
Status Continuing
Funding Source BSAC Member Fees
IAB Research Area Physical Sensors & Devices
Researcher(s) Sina Akhbari
Advisor(s) Liwei Lin
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