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BPN753: Ratio-Metric Readout Technique for MEMS Gyroscopes with Force Feedback

Project ID BPN753
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Start Date Tue 2014-Feb-04 15:44:58
Last Updated Mon 2014-Aug-18 12:20:28
Abstract Scale factor accuracy is critical for navigation grade gyroscopes. Traditional MEMS vibratory gyroscopes with force feedback provide good resolution, but their scale factor depends on a plethora of parameters including proof mass bias voltage, drive mode velocity,dimensions of the forcer electrodes,and mass. This project develops a ratio-metric readout technique for force feedback gyroscopes that provides a precise scale factor. Scale factor variations over 12 days are reduced from 547ppm p-p to 23ppm p-p, and temperature coefficient of the scale factor is reduced from 560ppm/C to 4ppm/C at room temperature.
Status New
Funding Source Federal
IAB Research Area Physical Sensors & Devices
Researcher(s) Burak Eminoglu, Igor Izyumin, Yu-Ching Yeh
Advisor(s) Bernhard E. Boser
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