| Project ID |
BPN785 |
| Website |
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| Start Date |
Tue 2015-Feb-03 09:30:30 |
| Last Updated |
Fri 2018-Jan-26 16:29:22 |
| Abstract |
The goal of this project is to design, fabricate and characterize novel MEMS devices based on scandium aluminum nitride (ScAlN) thin films. ScAlN thin film is a promising piezoelectric material due to its CMOS process compatibility, low relative permittivity and high piezoelectric coefficient and enables better performance of piezoelectric MEMS devices. |
| Status |
Continuing |
| Funding Source |
BSAC Member Fees |
| IAB Research Area |
Physical Sensors & Devices |
| Researcher(s) |
Qi Wang |
| Advisor(s) |
David A. Horsley |
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