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BPN849: Large-Amplitude PZT PMUTs

Project ID BPN849
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Start Date Tue 2016-Aug-30 15:46:30
Last Updated Mon 2017-Jan-30 10:34:36
Abstract Thin film lead zirconate titanate (PZT), which has high piezoelectric coefficient, has been widely used as a piezoelectric material in MEMS devices. We design and characterize PZT PMUTs with a large displacement amplitude for in air operation.
Status Continuing
Funding Source BSAC Member Fees
IAB Research Area Physical Sensors & Devices
Researcher(s) Yuri Kusano
Advisor(s) David A. Horsley
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