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BPN851: High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates

Project ID BPN851
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Start Date Tue 2017-Jan-10 16:34:44
Last Updated Wed 2017-Feb-01 08:52:12
Abstract This paper presents a high fill-factor array of aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) fabricated on a glass substrate.
Status New
Funding Source Industry
IAB Research Area Physical Sensors & Devices
Researcher(s) Guo-Lun Luo
Advisor(s) David A. Horsley
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