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KSJP33a: Tools for Microassembly

Project ID KSJP33a
Website
Start Date Tue 2005-Aug-30 10:58:17
Last Updated Tue 2005-Aug-30 17:45:40
Abstract Complex three dimensional micromechanical systems can be built using multi-layer MEMS processes. There is however a tradeoff available between process complexity and post-fabrication complexity (assembly operations). In this project, we fabricate sockets, connectors and the tools to pick up and rotate them using a single mask Silicon-on-Insulator (SOI) process. We then use pick and place assembly to create complex mechanical micro-systems which are difficult to realize with conventional fabrication techniques.
Status New
Funding Source
IAB Research Area Package, Process & Microassembly
Researcher(s) Subramaniam Venkatraman
Advisor(s) Kristofer S.J. Pister
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