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LPL20: A new pressure tranduction mechanism using elastomer micromolding

Project ID LPL20
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Start Date NO START DATE RECORDED
Last Updated Mon 2004-Feb-09 18:10:09
Abstract Local on-chip pressure sensing is an important application of micro-electro-mechanical devices. Traditionaly, sensing has been done based on either piezoelectric material properties or capacitance measurements across a micromachined cavity.
Status New
Funding Source State
IAB Research Area BIOMEMS AND MICROFLUIDICS
Researcher(s) Cristian Ionescu-Zanetti
Advisor(s) Luke P. Lee
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