LPL20: A new pressure tranduction mechanism using elastomer micromolding

Project ID LPL20 Website Start Date NO START DATE RECORDED Last Updated Mon 2004-Feb-09 18:10:09 Abstract Local on-chip pressure sensing is an important application of micro-electro-mechanical devices. Traditionaly, sensing has been done based on either piezoelectric material properties or capacitance measurements across a micromachined cavity. Status New Funding Source State IAB Research Area BIOMEMS AND MICROFLUIDICS Researcher(s) Cristian Ionescu-Zanetti Advisor(s) Luke P. Lee

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