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LWL12: Disposable Microbatteries and Microvehicles for MEMS

Project ID LWL12
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Start Date NO START DATE RECORDED
Last Updated Wed 2003-Aug-20 21:49:19
Abstract This research aims to develop microbatteries and microvehicles that can be integrated with disposable MEMS or bioMEMS devices as power sources and transport microdevices from one place to other place. As such, the fabrication processes of the microbatteries and microvehicles are to be compatible with common MEMS fabrication processes and IC manufacturing processes, such as the CMOS process.
Status Continuing
Funding Source Federal
IAB Research Area Micropower
Researcher(s) Ki Bang Lee, Firas Sammoura
Advisor(s) Liwei Lin
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