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LWL19: Nickel Nanocomposite Film for MEMS Applications

Project ID LWL19
Website
Start Date NO START DATE RECORDED
Last Updated Tue 2003-Aug-19 14:13:46
Abstract The ultimate goal is to develop CMOS-compatible, low cost nickel-nanocomposite materials to complement polysilicon for use as MEMS structural material.
Status No Activity
Funding Source Other
IAB Research Area Package, Process & Microassembly
Researcher(s) Kwok-Siong Teh
Advisor(s) Liwei Lin
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