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LWL20: CMOS-Compatible Synthesis of Carbon Nanotubes for Sensor Applications

Project ID LWL20
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Start Date Tue 2012-Feb-07 16:29:39
Last Updated Tue 2012-Feb-28 19:41:15
Abstract The goal of this project is to develop a microelectronics-compatible synthesis method and direct integration of carbon nanotubes into MEMS and CMOS for sensors applications. Electrical process control, compatible with automation and wafer-level production, has been implemented. The project is partially carried out within the collaboration program between Vestfold University College (Norway) and UC Berkeley which is funded by The Norwegian Centre for International Cooperation in Higher Education (SIU).
Status Continuing
Funding Source
IAB Research Area Package, Process & Microassembly
Researcher(s) Bao Quoc Ta, Quoc-Huy Nguyen, Heather Chiamori
Advisor(s) Liwei Lin, Knut E. Aasmundtveit
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