LWL21: Microfabricated Torsional Actuator by Self-Aligned Plastic Deformation

Project ID LWL21 Website Start Date Fri 2003-Feb-07 16:09:33 Last Updated Sun 2004-Feb-08 17:25:02 Abstract The objective of this project is to develop vertically driven comb actuators with self-aligned comb sets using a novel yet simple fabrication process and apply it to optical MEMS devices. Status Continuing Funding Source Other IAB Research Area Physical Sensors & Devices Researcher(s) Jongbaeg Kim Advisor(s) Liwei Lin

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