| Project ID |
LWL23 |
| Website |
|
| Start Date |
Mon 2003-Feb-10 14:38:42 |
| Last Updated |
Wed 2003-Aug-20 10:29:09 |
| Abstract |
This research aims to develop vertically supported microactuators and optical systems on a chip for MEMS and MOEMS applications that require motions of surface-micromachined microstructures or microoptical components. The fabrication process of microactuators is compatable with common MEMS fabrication process and IC manufacturing process, such as the CMOS process. |
| Status |
Continuing |
| Funding Source |
Other |
| IAB Research Area |
NanoPlasmonics, Microphotonics & Imaging |
| Researcher(s) |
Ki Bang Lee |
| Advisor(s) |
Liwei Lin |
|
|
