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LWL23: Vertically Supported Microactuators

Project ID LWL23
Website
Start Date Mon 2003-Feb-10 14:38:42
Last Updated Wed 2003-Aug-20 10:29:09
Abstract This research aims to develop vertically supported microactuators and optical systems on a chip for MEMS and MOEMS applications that require motions of surface-micromachined microstructures or microoptical components. The fabrication process of microactuators is compatable with common MEMS fabrication process and IC manufacturing process, such as the CMOS process.
Status Continuing
Funding Source
IAB Research Area NanoPlasmonics, Microphotonics & Imaging
Researcher(s) Ki Bang Lee
Advisor(s) Liwei Lin
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