| Project ID |
LWL29 |
| Website |
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| Start Date |
Thu 2004-Sep-02 15:33:15 |
| Last Updated |
Mon 2005-Jan-31 20:23:54 |
| Abstract |
High vacuum inside a micro-cavity is hoped to be obtained and maintained for lifetime of a MEMS. This project will supply design rules of getter dimensions in MEMS packaging by exploring the relationships of the residual gas pressure and its variety in a cavity with (1) the different getter materials, such as Ti, Zr, V, and their mixture, (2) the surface area, thickness, and amount of the getter deposited respectively. Multi-times activating the getter by means of localized heating to improve the efficiency of it. Develop nano-getter with high porosity and large surface area. Design and fabrication of nano-ion-pump to adsorb inert gases such as Ar and He. Design and fabrication of nano- or micro-vacuum gauge to monitor the vacuum changing inside the micro-cavity because of the effect of getter, outgassing and leakage. |
| Status |
Continuing |
| Funding Source |
Other |
| IAB Research Area |
Package, Process & Microassembly |
| Researcher(s) |
Daoheng Sun, Dane Christensen |
| Advisor(s) |
Liwei Lin |
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