BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Lin
     
 Lee
 Lin
 Wu
 

LWL29: Nano-Getters for MEMS Applications

Project ID LWL29
Website
Start Date Thu 2004-Sep-02 15:33:15
Last Updated Mon 2005-Jan-31 20:23:54
Abstract High vacuum inside a micro-cavity is hoped to be obtained and maintained for lifetime of a MEMS. This project will supply design rules of getter dimensions in MEMS packaging by exploring the relationships of the residual gas pressure and its variety in a cavity with (1) the different getter materials, such as Ti, Zr, V, and their mixture, (2) the surface area, thickness, and amount of the getter deposited respectively. Multi-times activating the getter by means of localized heating to improve the efficiency of it. Develop nano-getter with high porosity and large surface area. Design and fabrication of nano-ion-pump to adsorb inert gases such as Ar and He. Design and fabrication of nano- or micro-vacuum gauge to monitor the vacuum changing inside the micro-cavity because of the effect of getter, outgassing and leakage.
Status Continuing
Funding Source
IAB Research Area Package, Process & Microassembly
Researcher(s) Daoheng Sun, Dane Christensen
Advisor(s) Liwei Lin
Detailed Information
Secure Access

Private Abstract
Research Report
Poster Slide
Summary Slide PDF | VIDEO
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: December 22, 2014, 1:22 pm