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NT13: RF Dielectric Fluid Immersed Silicon MEMS Tunable Capacitors

Project ID NT13
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Start Date NO START DATE RECORDED
Last Updated Thu 2004-Feb-12 15:04:33
Abstract The objective of this project is to develop micro-electromechanical tunable capacitors employing dielectric fluids. In the case of electrostatic, mechanically tunable capacitors the goal is to increase the capacitance per unit area and the tuning range, reduce the mechanical noise and also improve mechanical performance and long-term reliability.
Status Continuing
Funding Source
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Daniel T. McCormick, Zhihong Li
Advisor(s) Norman C. Tien
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