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NT23: Ni Electroplated Vertical Comb-Drive Actuator

Project ID NT23
Website
Start Date Wed 2004-Jan-28 11:56:25
Last Updated Mon 2004-Feb-09 15:22:00
Abstract A low-cost, vertical comb-drive actuator has been developed employing a thick photoresist and electroplating process. The vertical comb-drive actuator (VCA) will be employed for optical applications such as scanning mirrors and optical communication as well as other devices such as tunable capacitors
Status New
Funding Source
IAB Research Area Physical Sensors & Devices
Researcher(s) Zhihong Li
Advisor(s) Norman C. Tien
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