| Project ID |
NT23 |
| Website |
|
| Start Date |
Wed 2004-Jan-28 11:56:25 |
| Last Updated |
Mon 2004-Feb-09 15:22:00 |
| Abstract |
A low-cost, vertical comb-drive actuator has been developed employing a thick photoresist and electroplating process. The vertical comb-drive actuator (VCA) will be employed for optical applications such as scanning mirrors and optical communication as well as other devices such as tunable capacitors |
| Status |
New |
| Funding Source |
Other |
| IAB Research Area |
Physical Sensors & Devices |
| Researcher(s) |
Zhihong Li |
| Advisor(s) |
Norman C. Tien |
|
|
