NT24: High-Performance MEMS Capacitors

Project ID NT24 Website Start Date Wed 2004-Aug-18 13:54:04 Last Updated Tue 2005-Feb-01 22:45:58 Abstract A set of MEMS based variable capacitors will be designed, fabricated, characterized and integrated into QUASAR’s free-space capacitive EEG sensor for ultra-sensitive charge measurement. Status Continuing Funding Source Federal IAB Research Area Wireless, RF & Smart Dust Researcher(s) Dan McCormick, Ming Li Advisor(s) Norman C. Tien

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