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NT24: High-Performance MEMS Capacitors

Project ID NT24
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Start Date Wed 2004-Aug-18 13:54:04
Last Updated Tue 2005-Feb-01 22:45:58
Abstract A set of MEMS based variable capacitors will be designed, fabricated, characterized and integrated into QUASAR’s free-space capacitive EEG sensor for ultra-sensitive charge measurement.
Status Continuing
Funding Source Federal
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Dan McCormick, Ming Li
Advisor(s) Norman C. Tien
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