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NT25: VLSI MEMS Switch

Project ID NT25
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Start Date Tue 2005-Feb-01 16:09:34
Last Updated Wed 2006-Aug-23 01:25:54
Abstract Two important advantages of MEMS switches are their ability to survive heat and radiation. In addition, there has been increasing demand for passing transistor replacement in specific reconfigurable computing and signal routing application; passing transistors used in VLSI exhibit on-state resistances of thousands of ohms or more, which causes signal delay and increased power consumption. In this project, the design, fabrication and characterization of MEMS contact switches customized for VLSI are presented, herein referred to as “VLSI MEMS switches”.
Status Continuing
Funding Source Federal
IAB Research Area Physical Sensors & Devices
Researcher(s) Qingquan Liu
Advisor(s) Norman C. Tien, David A. Horsley
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