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RM6: Adhesion in MEMS

Project ID RM6
Website
Start Date Fri 2003-Feb-07 16:11:50
Last Updated Fri 2004-Feb-20 08:48:43
Abstract The ultimate goal of this project is to further develop previous work that involved adhesion studies in MEMS devices.
Status Continuing
Funding Source Industry
IAB Research Area Package, Process & Microassembly
Researcher(s) Robert Ashurst, Elizabeth E. Parker
Advisor(s) Roya Maboudian
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Research Report
Summary Slide PDF | VIDEO
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