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RM8: Stiction in MEMS

Project ID RM8
Website
Start Date Thu 2004-Sep-02 11:22:41
Last Updated Tue 2005-Feb-01 12:43:00
Abstract Electrostatic forces, due to trapped charge or applied voltage, can lead to unwanted adhesion in MEMS devices. We wish to use various techniques, including Electronic Force Microscopy (EFM) and Cantilever Beam Arrays (CBA), to characterize the effect of surface modifications on the electrical properties of MEMS components and to better understand the forces that cause stiction. This knowledge will enable one to develop novel surface modifications or self-assembling monolayers that are specifically designed to combat stiction due to electronic forces.
Status Continuing
Funding Source Industry
IAB Research Area Package, Process & Microassembly
Researcher(s) Brian Bush
Advisor(s) Roya Maboudian
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