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RSM36: Selectively Addressed MEMS Digital-Mirror Arrays for Adaptive Optics

Project ID RSM36
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Start Date Wed 2004-Jan-21 08:34:32
Last Updated Fri 2007-Feb-02 12:23:55
Abstract This project investigates the design of MEMS-deformable-mirror (DM) arrays for adaptive-optics (AO) systems. In these arrays, micromirror segments are individually addressed and controlled to correct the aberrated wavefronts of an optical beam dynamically. This correction improves image resolution in telescopes or vision-science instruments. Our research focuses on developing a CMOS-compatible MEMS process to integrate micromirrors with their driving electronics and control circuitry. In this way, we will control large mirror arrays selectively.
Status Continuing
Funding Source Federal
IAB Research Area NanoPlasmonics, Microphotonics & Imaging
Researcher(s) Blake Lin
Advisor(s) Richard S. Muller, Tsu-Jae King
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