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RSM38: MEMS Integrable Temperature Sensor

Project ID RSM38
Website
Start Date Wed 2004-Aug-18 13:25:38
Last Updated Fri 2004-Sep-10 18:56:30
Abstract Temperature sensors have wide range of application. They are needed in all fields of research ranging from chemistry and biology, to electrical engineering and mechanical engineering. As miniaturization takes steps into micro-scale, the need for obtaining thermal information becomes more prevalent. Our goal in this project aims at creating micro temperature sensor that can be integrated into the MEMS structures.
Status New
Funding Source
IAB Research Area NanoPlasmonics, Microphotonics & Imaging
Researcher(s) Chao-chih Hsu
Advisor(s) Richard S. Muller
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