BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Former Faculty
     
 Lee
 Lin
 Wu
 Howe
 Tien
 

RTH29: Lateral-Mode NEMS Resonators Using Internal Electrostatic Transduction

Project ID RTH29
Website
Start Date NO START DATE RECORDED
Last Updated Wed 2006-Aug-23 15:17:01
Abstract Electrostatic MEMS resonators show great promise for RF front end applications. Their high motional resistance, however, is one of the major problems for their widespread applications. In this project, we aim to reduce such resistance by using high K dielectric instead of air gaps for transduction. Prototype devices are now being fabricated and will be characterize to see the improvements in performance.
Status Continuing
Funding Source Industry
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Hei Kam
Advisor(s) Tsu-Jae King, Roger T. Howe
Detailed Information
Secure Access

Private Abstract
Research Report
Poster
Summary Slide
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: July 23, 2014, 11:18 pm