| Project ID |
RTH29 |
| Website |
|
| Start Date |
NO START DATE RECORDED |
| Last Updated |
Wed 2006-Aug-23 15:17:01 |
| Abstract |
Electrostatic MEMS resonators show great promise for RF front end applications. Their high motional resistance, however, is one of the major problems for their widespread applications. In this project, we aim to reduce such resistance by using high K dielectric instead of air gaps for transduction. Prototype devices are now being fabricated and will be characterize to see the improvements in performance. |
| Status |
Continuing |
| Funding Source |
Industry |
| IAB Research Area |
Wireless, RF & Smart Dust |
| Researcher(s) |
Hei Kam |
| Advisor(s) |
Tsu-Jae King, Roger T. Howe |
|
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