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RTH30: Micromachined Electrodes for Capacitive Sensors

Project ID RTH30
Website
Start Date NO START DATE RECORDED
Last Updated Wed 2003-Aug-13 19:11:49
Abstract The goal of this project is to develop and batch fabricate a very precise electrode for a high performance capacitive sensor using microfabrication techniques.
Status Completed
Funding Source
IAB Research Area Physical Sensors & Devices
Researcher(s) Noel Arellano
Advisor(s) Roger T. Howe
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