RTH30: Micromachined Electrodes for Capacitive Sensors

Project ID RTH30 Website Start Date NO START DATE RECORDED Last Updated Wed 2003-Aug-13 19:11:49 Abstract The goal of this project is to develop and batch fabricate a very precise electrode for a high performance capacitive sensor using microfabrication techniques. Status Completed Funding Source Other IAB Research Area Physical Sensors & Devices Researcher(s) Noel Arellano Advisor(s) Roger T. Howe

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