BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Howe
     
 Lee
 Lin
 Wu
 Howe
 Tien
 

RTH42: Nanowire-Coupled Resonators

Project ID RTH42
Website
Start Date Fri 2004-Feb-06 17:27:43
Last Updated Sat 2007-Feb-17 18:20:13
Abstract We have developed fabrication processes to create top down nanowire coupled resonators. The critical dimensions were defined using a combination of iline lithography, photoresist ashing techniques and focused ion beam trimming. Nanowires are used as mechanical elements to demonstrate low velocity and maximum velocity coupling. We have also demonstrated an bottom up/ top down integrated fabrication process. Features for the top down segment of the fabrication process are aligned to (111) flat on a (110) SOI wafer. A gold based galvanic displacement method selectively deposits catalyst particles on exposed silicon sidewalls. Si VLS nanowires are then grown on the top down structures. The structures are then released with the Si nanowires acting as mechanical springs suspending the devices above the handle wafer.
Status Continuing
Funding Source Federal
IAB Research Area Package, Process & Microassembly
Researcher(s) Noel Arellano
Advisor(s) Roger T. Howe,Roya Maboudian
Detailed Information
Secure Access

Private Abstract
Research Report
Poster
Summary Slide PDF | VIDEO
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: December 21, 2014, 4:48 am