Project ID |
RTH46/JD |
Website |
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Start Date |
Tue 2005-Feb-01 17:30:52 |
Last Updated |
Sun 2006-Feb-05 15:31:55 |
Abstract |
Electromechanical resonators and filters, such as quartz, ceramic, and
surface-acoustic wave devices, are important signal-processing elements in
communication systems. Over the past decade, there has been substantial
progress in developing new types of miniaturized electromechanical
resonators using microfabrication processes. For these micro-resonators
to be viable, they must have high and predictable quality factors (Q).
Depending on scale and geometry, the energy losses that lower Q may come
from material damping, thermoelastic damping, air damping, or radiation of
elastic waves from an anchor. Our goal is to understand these loss
sources quantitatively; and to provide a computational tool, HiQLab, to
predict and optimize resonator response before embarking on costly
manufacturing and re-design cycles. |
Status |
Continuing |
Funding Source |
Federal |
IAB Research Area |
CAD |
Researcher(s) |
David Bindel, Emmanuel Quevy, Tsuyoshi Koyama, Wei He |
Advisor(s) |
Roger T. Howe, James W. Demmel, Sanjay Govindjee |
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