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RTH46/JD: MEMS Resonator Simulation

Project ID RTH46/JD
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Start Date Tue 2005-Feb-01 17:30:52
Last Updated Sun 2006-Feb-05 15:31:55
Abstract Electromechanical resonators and filters, such as quartz, ceramic, and surface-acoustic wave devices, are important signal-processing elements in communication systems. Over the past decade, there has been substantial progress in developing new types of miniaturized electromechanical resonators using microfabrication processes. For these micro-resonators to be viable, they must have high and predictable quality factors (Q). Depending on scale and geometry, the energy losses that lower Q may come from material damping, thermoelastic damping, air damping, or radiation of elastic waves from an anchor. Our goal is to understand these loss sources quantitatively; and to provide a computational tool, HiQLab, to predict and optimize resonator response before embarking on costly manufacturing and re-design cycles.
Status Continuing
Funding Source Federal
IAB Research Area CAD
Researcher(s) David Bindel, Emmanuel Quevy, Tsuyoshi Koyama, Wei He
Advisor(s) Roger T. Howe, James W. Demmel, Sanjay Govindjee
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